Reflection high-energy electron diffraction

Reflection High-Energy Electron Diffraction (RHEED) is a surface-sensitive analytical technique used primarily to characterize the structure and properties of thin films and surfaces at the atomic level. The method involves directing a beam of high-energy electrons—typically in the range of 10 to 100 keV—at a shallow angle onto the surface of a sample, such as a thin film or a crystalline substrate.