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A diffusion pump is a type of vacuum pump that uses vapor dynamic processes to achieve high vacuum levels, typically in the range of 10^-3 to 10^-10 torr. It works by utilizing a jet of vapor, usually from a fluid such as oil or mercury, which is directed into a diffusion chamber. **Key components and operation:** 1. **Vapor Source:** The pump contains a heated reservoir where the fluid is vaporized.

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  1. Vacuum pumps
  2. Vacuum
  3. Physical phenomena
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