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A cryopump is a type of vacuum pump that uses cryogenic temperatures to remove gas from a vacuum chamber. It operates by cooling a surface to very low temperatures, typically using liquid cryogens like liquid nitrogen or helium, which causes gases to condense or freeze onto the surface.

Ancestors (6)

  1. Vacuum pumps
  2. Vacuum
  3. Physical phenomena
  4. Concepts in physics
  5. Physics
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